Magnetic Actuation Principle
The MEMS mirrors are actuated at their mechanical resonant frequency. The maximum intrinsic silicon material gain is used, to obtain the widest possible scanning angle at an ultra-low power consumption level.
MEMS mirror actuation does not use gearing effects or any other mechanical contact-based effects. It uses an innovative fatigue-free magnetic actuation: en electric current flowing on the mirror itself, under a magnetic field, induces mechanical displacement, advanteagously used for optical scanning.
Key Actuation Characteristics :
- CMOS-compatible actuation voltage (< 3V)
- Very high-frequency operation (up to 70kHz)
- Large scanning angle (up to 80°) with low power consumption
- Embedded scanning angle sensor
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MEMS Projection Principle
The uniqueness of the MEMS scanning mirror for projection is the ability to continuously scan from left to right and top to bottom, therefore enabling the use of a single MEMS mirror instead of a mirror matrix with a large number of digital mirrors.
The image/video is displayed by pulsing three laser light sources, Red Blue and Green, during the mirror scan, resulting in the creation of the image pixel-by-pixel. This proven projection principle is higly robust, as it has been used for decades in the CRT (Cathode Ray Tube) televisions.
The image color is achieved by mixing the three basic RGB colors with a so-called beam-combiner, largely used and validated in the medical eye-surgery industry.
Lemoptix has combined expertise in multiple, strongly interlinked engineering areas, including MEMS, packaging, smart assembly, electronics (digital and analog) and optics.
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MEMS Technology
The Lemoptix scanning mirror core device is based on MEMS (Micro-Electro Mechanical System) technology. This technology is directly derived from the standard semiconductor industry.
MEMS-based Devices at a Glance
In the past 20 years, due to the unique properties and reliability of mechanical silicon-based MEMS devices, many of these "invisible" components have been integrated as core devices in numerous products: A few key examples are vehicle shock sensors for air-bag actuation, pressure sensors in planes for altitude control, silicon microphones in mobile phones, direction sensors for gaming applications (e.g. Wii gaming machine)...
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